Session Track
April 25 (Thursday)
구조 및 재료
Poster,
제주 KAL 호텔 2F 로비
P5-3
Design optimization of 100um thick single structure three-axis MEMS gyroscope
This work presents a three-axis micro-electro-mechanical systems (MEMS) gyroscope design optimization. A 100um thick structure is designed to mitigate the effects of external vibrations and improve the gyroscope performance. Due to design complexity, COMSOL Multiphysics was used to optimize the resonant frequency of the three-axis gyroscope. The effect of different springs on the resonant modes were studied. The simulation results reveal that the three-axis gyroscope drive mode resonant frequency is 25989 Hz, while the x-sense, y-sense and z-sense have resonant frequencies of 26120 Hz, 26175 Hz and 25651 Hz respectively. To reduce the effect of unwanted frequencies, the drive mode, the unwanted frequencies were kept high, and the frequency differences of more than 1kHz.
Keywords :
MEMS, inertial sensor, three-axis gyroscope
Paper : P5-3.pdf
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