Abstract: In this paper, we investigate the effect of the applied driving force on the resonance frequency and the resonance frequency of the MEMS resonators. To quantify the measurement uncertainties, the measurement system analysis (MSA) was performed using the analysis of variance (ANOVA) method. The results demonstrate that the resonant frequency is mostly affected by the systematic errors and is independent of the applied force strength. However, the quality factor is strongly dependent on the applied driving force.